| 000 | 00387nam a2200157Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240101072743.0 | ||
| 008 | 170524s9999 xx 000 0 und d | ||
| 020 | _a9780195136050 | ||
| 040 | _cIIMT UNIVERSITY | ||
| 100 | _aCampell Stephen A | ||
| 245 | 4 | _aThe Science and Engineering Microelectronic Fabrication | |
| 260 | _bOxford | ||
| 260 | _c2005 | ||
| 942 |
_2ddc _c02 |
||
| 999 |
_c5011 _d5011 |
||