| 000 | 00434nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240207112639.0 | ||
| 008 | 170619s9999 xx 000 0 und d | ||
| 020 | _a0195136055 | ||
| 040 | _cIIMT ENGINEERING COLLEGE | ||
| 100 | _aCampbell- Stephen A | ||
| 245 | 4 | _aTHE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION | |
| 260 | _bNew York; Oxford | ||
| 260 | _c2001 | ||
| 546 | _aENGLISH | ||
| 942 |
_2ddc _c01 |
||
| 999 |
_c17485 _d17485 |
||