00263nam a2200109Ia 4500008004100000100002200041245003600063260001600099260000900115546001200124999001700136170619s9999    xx            000 0 und d  aVaradan- Vijay K. 0aSmart Material Systems and MEMS  bWiley-India  c2011  aENGLISH  c20583d20583