00263nam a2200109Ia 4500008004100000100002100041245003200062260002100094260000900115546001200124999001700136170619s9999    xx            000 0 und d  aGandhi- Sorab K. 0aVLSI Fabrication Principles  bSingapore; Wiley  c2004  aENGLISH  c17887d17887