00245nam a2200097Ia 4500 170619s9999 xx 000 0 und d Elliott- David J. Integrated circuit fabrication technology Mc Graw Hill 1989 ENGLISH 17647 17647 0 0 ddc 0 0 06 06 2005-01-27 1 0 06-B-12416 2017-07-03 2017-07-03 01