00286nam a2200121Ia 4500003000400000005001700004008004100021020001800062040001000080100002200090245003600112260001600148OSt20231229094405.0170523s9999    xx            000 0 und d  a9788126531707  cIIMTU  aVaradan- Vijay K. 0aSmart Material Systems and MEMS  aWiley India